Solventless, Resistless, Direct Dielectric Patterning

    • Application Type:
      Foreign National
      Patent Number:
      171285
      Country:
      Taiwan
      Status:
      Filed on 9-Jan-2001, Issued on 2-Jun-2003, Patent Abandoned
      Organization:
      Mass. Institute of Technology
      SRC Filing ID:
      P0207

    Inventors

    • Christopher K. Ober (Cornell)
    • Karen K. Gleason (MIT)
    • Daniel J. C. Herr (SRC)

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