Optical Proximity Correction Using Regression

    • Application Type:
      Utility
      Patent Number:
      8201110
      Country:
      United States
      Status:
      Filed on 14-Apr-2009, Issued on 12-Jun-2012, Patent Abandoned
      Organization:
      University of California, Berkeley
      SRC Filing ID:
      P1118

    Inventors

    • Allan X. Gu (UC/Berkeley)
    • Avideh Zakhor (UC/Berkeley)
    • Peiran Gao (UC/Berkeley)

    Related Patents

    P1056
    Application Expired
    GRC

    Optical Proximity Correction Using Regression

    Peiran Gao (UC/Berkeley); Allan X. Gu (UC/Berkeley); Avideh Zakhor (UC/Berkeley)
    Patent Application Expired
    Application Type: Provisional

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