Step and Flash Imprint Lithography

    • Application Type:
      European Patent Office
      Patent Number:
      1228401
      Status:
      Filed on 3-Mar-2000, Issued on 10-Aug-2005
      Organization:
      University of Texas at Austin
      SRC Filing ID:
      P0245

    Inventors

    • Grant Willson (UT/Austin)
    • Matthew E. Colburn (UT/Austin)

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