Step and Flash Imprint Lithography

    • Application Type:
      Foreign National
      Patent Number:
      WO2000054107 A
      Country:
      Japan
      Status:
      Filed on 3-Mar-2000, Issued on 2-May-2000, Patent Expired
      Organization:
      University of Texas at Austin
      SRC Filing ID:
      P0233

    Inventors

    • Grant Willson (UT/Austin)
    • Matthew E. Colburn (UT/Austin)

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