Solventless, Resistless, Direct Dielectric Patterning

    • Application Type:
      Utility
      Patent Number:
      6509138
      Country:
      United States
      Status:
      Filed on 12-Jan-2000, Issued on 21-Jan-2003
      Organization:
      Mass. Institute of Technology
      SRC Filing ID:
      P0087

    Inventors

    • Karen K. Gleason (MIT)
    • Christopher K. Ober (Cornell)
    • Daniel J. C. Herr (SRC)

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