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GRC Science Area
MPS – Material & Process Sciences
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| 1 through 23 of
23 similar documents, best matches first. |
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- 1:
Surface Modifcation of CVD Polymer Films (Patent P0591) - SRC
- Surface Modifcation of CVD Polymer Films Application Type: Utility Patent Number: 7501154 Country: United States Status: Filed on 18-Feb-2005, Issued on 10-Mar-2009 Organization: ...
URL: https://www.src.org/library/patent/p0591/
Modified: 2009-03-10 - 22KB
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- 2:
Growth of Inorganic Thin Films using Self-Assembled Monolayers...
- Growth of Inorganic Thin Films using Self-Assembled Monolayers as Nucleation Sites Application Type: Utility Patent Number: 7829150 Country: United States Status: Filed on ...
URL: https://www.src.org/library/patent/p1139/
Modified: 2010-11-09 - 22KB
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- 3:
Oxidation Resistant High Conductivity Copper Layers For Microelectroni...
- Oxidation Resistant High Conductivity Copper Layers For Microelectronic Applications and Process of Making Same Application Type: Divisional Patent Number: 5959358 Country: United ...
URL: https://www.src.org/library/patent/p0054/
Modified: 1999-09-28 - 24KB
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- 4:
Passivated Copper Conductive Layers for Microelectronic Applications...
- Passivated Copper Conductive Layers for Microelectronic Applications and Methods of Manufacturing Same Application Type: Utility Patent Number: 5766379 Country: United States ...
URL: https://www.src.org/library/patent/p0015/
Modified: 1998-06-16 - 24KB
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- 5:
Polyelectrolyte Nanolayers as Diffusion Barriers In Semiconductor...
- Polyelectrolyte Nanolayers as Diffusion Barriers In Semiconductor Devices Application Type: Utility Patent Number: 7081674 Country: United States Status: Filed on 11-Jun-2004, ...
URL: https://www.src.org/library/patent/p0466/
Modified: 2006-07-25 - 22KB
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- 6:
Self-Assembled Sub-Nanolayers as Interfacial Adhesion Enhancers...
- Self-Assembled Sub-Nanolayers as Interfacial Adhesion Enhancers and Diffusion Barriers Application Type: Utility Patent Number: 7026716 Country: United States Status: Filed on ...
URL: https://www.src.org/library/patent/p0415/
Modified: 2006-04-11 - 22KB
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- 7:
Fluorine Diffusion Barriers for Fuorinated Dielectrics in Integrated...
- Fluorine Diffusion Barriers for Fuorinated Dielectrics in Integrated Circuits Application Type: Utility Patent Number: 6818990 Country: United States Status: Filed on 3-Apr-2000, ...
URL: https://www.src.org/library/patent/p0589/
Modified: 2004-11-16 - 22KB
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- 8:
Passivated Copper Conductive Layers for Microelectric Applications...
- Passivated Copper Conductive Layers for Microelectric Applications Application Type: Divisional Patent Number: 6057223 Country: United States Status: Filed on 10-Feb-1998, Issued ...
URL: https://www.src.org/library/patent/p0048/
Modified: 2000-05-02 - 22KB
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- 9:
Deposition of Metals on Stepped Surfaces (Patent P0114) - SRC
- Deposition of Metals on Stepped Surfaces Application Type: Utility Patent Number: 4944961 Country: United States Status: Filed on 5-Aug-1988, Issued on 31-Jul-1990, Patent Expired ...
URL: https://www.src.org/library/patent/p0114/
Modified: 1990-07-31 - 21KB
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- 10:
Surface Barrier Silylation of Novolak Film Without Photoactive...
- Surface Barrier Silylation of Novolak Film Without Photoactive Additive Patterned with 193 nm Excimer Laser Application Type: Utility Patent Number: 5139925 Country: United States ...
URL: https://www.src.org/library/patent/p0080/
Modified: 1992-08-18 - 20KB
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- 11:
Guided Self-Assembly of Block Copolymer Films on Interferometrically...
- Guided Self-Assembly of Block Copolymer Films on Interferometrically Nanopatterned Substrates Application Type: Divisional Patent Number: 6926953 Country: United States Status: ...
URL: https://www.src.org/library/patent/p0445/
Modified: 2005-08-09 - 22KB
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- 12:
Guided Self-Assembly of Block Copolymer Films on Interferometrically...
- Guided Self-Assembly of Block Copolymer Films on Interferometrically Nanopatterned Substrates Application Type: Utility Patent Number: 6746825 Country: United States Status: Filed ...
URL: https://www.src.org/library/patent/p0293/
Modified: 2004-06-08 - 23KB
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- 13:
Method for Making a Thin Film of Polymer (Patent P0170) - SRC
- Method for Making a Thin Film of Polymer Application Type: Utility Patent Number: 4925612 Country: United States Status: Filed on 5-Sep-1989, Issued on 15-May-1990, Patent Expired ...
URL: https://www.src.org/library/patent/p0170/
Modified: 1990-05-15 - 20KB
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- 14:
Process for Producing Thin Film Polymer Film by Pulsed Laser...
- Process for Producing Thin Film Polymer Film by Pulsed Laser Evaporation Application Type: Utility Patent Number: 5288528 Country: United States Status: Filed on 2-Feb-1993, Issued ...
URL: https://www.src.org/library/patent/p0167/
Modified: 1994-02-22 - 20KB
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- 15:
Positive Resist Pattern Formation Through Focused Ion Beam Exposure...
- Positive Resist Pattern Formation Through Focused Ion Beam Exposure and Surface Barrier Silylation Application Type: Continuation (in part) Patent Number: 5362606 Country: United ...
URL: https://www.src.org/library/patent/p0060/
Modified: 1994-11-08 - 21KB
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- 16:
Multi-Layered Attenuated Phase Shift Mask and a Method for Making...
- Multi-Layered Attenuated Phase Shift Mask and a Method for Making the Mask Application Type: Utility Patent Number: 5939227 Country: United States Status: Filed on 9-Mar-1998, ...
URL: https://www.src.org/library/patent/p0052/
Modified: 1999-08-17 - 30KB
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- 17:
Photoresist Compositions Comprising Norbornene Derivative Polymers...
- Photoresist Compositions Comprising Norbornene Derivative Polymers with Acid Labile Groups Application Type: Utility Patent Number: 6103445 Country: United States Status: Filed on ...
URL: https://www.src.org/library/patent/p0096/
Modified: 2000-08-15 - 23KB
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- 18:
Apparatus and Method for Real-Time Measurement of Thin Film Layer...
- Apparatus and Method for Real-Time Measurement of Thin Film Layer Thickness and Changes Thereof Application Type: Utility Patent Number: 5450205 Country: United States Status: ...
URL: https://www.src.org/library/patent/p0031/
Modified: 1995-09-12 - 21KB
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- 19:
Methods for Decreasing Surface Roughness in Novolak-Based Resists...
- Methods for Decreasing Surface Roughness in Novolak-Based Resists Application Type: Utility Patent Number: 6162592 Country: United States Status: Filed on 6-Oct-1998, Issued on ...
URL: https://www.src.org/library/patent/p0164/
Modified: 2000-12-19 - 22KB
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- 20:
Method and Apparatus for Providing Film Stress Measurements Based...
- Method and Apparatus for Providing Film Stress Measurements Based on Substrates Displacement Application Type: Utility Patent Number: 6826491 Country: United States Status: Filed ...
URL: https://www.src.org/library/patent/p0209/
Modified: 2004-11-30 - 22KB
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- 21:
Micromachines Scanning Thermal Probe Method and Apparatus (Patent...
- Micromachines Scanning Thermal Probe Method and Apparatus Application Type: Utility Patent Number: 6692145 Country: United States Status: Filed on 31-Oct-2001, Issued on ...
URL: https://www.src.org/library/patent/p0244/
Modified: 2004-02-17 - 22KB
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- 22:
Films for Use in Microelectronic Devices and Methods of Producing...
- Films for Use in Microelectronic Devices and Methods of Producing Same Application Type: Utility Patent Number: 6306495 Country: United States Status: Filed on 27-Jul-2000, Issued ...
URL: https://www.src.org/library/patent/p0156/
Modified: 2001-10-23 - 22KB
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- 23:
Films for Use in Microelectronic Devices and Methods of Producing...
- Films for Use in Microelectronic Devices and Methods of Producing Same Application Type: Utility Patent Number: 6114032 Country: United States Status: Filed on 10-Apr-1998, Issued ...
URL: https://www.src.org/library/patent/p0155/
Modified: 2000-09-05 - 22KB
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