Micromachines Scanning Thermal Probe Method and Apparatus

    • Application Type:
      Utility
      Patent Number:
      6692145
      Country:
      United States
      Status:
      Filed on 31-Oct-2001, Issued on 17-Feb-2004
      Organization:
      University of Wisconsin - Madison
      SRC Filing ID:
      P0244

    Inventors

    • Mo-huang Li (U of Wisconsin/Madison)
    • Yogesh Gianchandani (U of Wisconsin/Madison)
    • Julius J. Wu (U of Wisconsin/Madison)

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