Methods for Decreasing Surface Roughness in Novolak-Based Resists

• Application Type:

  Utility

  Patent Number:

  6162592

  Country:

  United States

  Status:

  Filed on 6-Oct-1998, Issued on 19-Dec-2000, Patent Abandoned

  Organization:

  University of Wisconsin - Madison

  SRC Filing ID:

  P0164

Inventors

• Geoffrey Reynolds (U of Wisconsin/Madison)
• James Taylor (U of Wisconsin/Madison)