Questions?
[x] Content Type
Patent Filings
[x] GRC Science Area
MPS – Material & Process Sciences
SRC Program
GRC 44
FCRP 2
Center
EBSM 3
FENA 2
Thrust/Theme
Factory Systems 14
BEP – Back End Processes 4
Back End Processes 3
ESH – Environment Safety and Hea... 3
PAT – Patterning 2
Pat(MPS) – Patterning 2
DCMOS – Digital CMOS Technologie... 1
Front End Processes 1
Materials 1
PatMat – Patterning Materials 1
1 through 30 of 44 similar documents, best matches first.   
Results by:Thunderstone Page: 1 2 next >>
1: Polyelectrolyte Nanolayers as Diffusion Barriers In Semiconductor...
Polyelectrolyte Nanolayers as Diffusion Barriers In Semiconductor Devices Application Type: Utility Patent Number: 7081674 Country: United States Status: Filed on 11-Jun-2004, ...
URL: https://www.src.org/library/patent/p0466/
Modified: 2006-07-25 - 22KB
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2: Method for Patterning a Radiation Sensitive Layer (Patent P0087...
Method for Patterning a Radiation Sensitive Layer Application Type: Utility Patent Number: 6509138 Country: United States Status: Filed on 12-Jan-2000, Issued on 21-Jan-2003 ...
URL: https://www.src.org/library/patent/p0087/
Modified: 2003-01-21 - 22KB
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3: Solventless, Resistless, Direct Dielectric Patterning (Patent...
Solventless, Resistless, Direct Dielectric Patterning Application Type: Foreign National Patent Number: 171285 Country: Taiwan Status: Filed on 9-Jan-2001, Issued on 2-Jun-2003, ...
URL: https://www.src.org/library/patent/p0207/
Modified: 2003-06-02 - 22KB
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4: Solventless, Resistless, Direct Dielectric Patterning (Patent...
Solventless, Resistless, Direct Dielectric Patterning Application Type: European Patent Office Patent Number: 1269259 Status: Filed on 11-Jan-2001, Issued on 8-Aug-2012, Patent ...
URL: https://www.src.org/library/patent/p0308/
Modified: 2012-08-08 - 22KB
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5: Surface Modifcation of CVD Polymer Films (Patent P0591) - SRC
Surface Modifcation of CVD Polymer Films Application Type: Utility Patent Number: 7501154 Country: United States Status: Filed on 18-Feb-2005, Issued on 10-Mar-2009 Organization: ...
URL: https://www.src.org/library/patent/p0591/
Modified: 2009-03-10 - 22KB
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6: Growth of Inorganic Thin Films using Self-Assembled Monolayers...
Growth of Inorganic Thin Films using Self-Assembled Monolayers as Nucleation Sites Application Type: Utility Patent Number: 7829150 Country: United States Status: Filed on ...
URL: https://www.src.org/library/patent/p1139/
Modified: 2010-11-09 - 22KB
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7: Fluorine Diffusion Barriers for Fuorinated Dielectrics in Integrated...
Fluorine Diffusion Barriers for Fuorinated Dielectrics in Integrated Circuits Application Type: Utility Patent Number: 6818990 Country: United States Status: Filed on 3-Apr-2000, ...
URL: https://www.src.org/library/patent/p0589/
Modified: 2004-11-16 - 22KB
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8: Self-Assembled Sub-Nanolayers as Interfacial Adhesion Enhancers...
Self-Assembled Sub-Nanolayers as Interfacial Adhesion Enhancers and Diffusion Barriers Application Type: Utility Patent Number: 7026716 Country: United States Status: Filed on ...
URL: https://www.src.org/library/patent/p0415/
Modified: 2006-04-11 - 22KB
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9: Passivated Copper Conductive Layers for Microelectric Applications...
Passivated Copper Conductive Layers for Microelectric Applications Application Type: Divisional Patent Number: 6057223 Country: United States Status: Filed on 10-Feb-1998, Issued ...
URL: https://www.src.org/library/patent/p0048/
Modified: 2000-05-02 - 22KB
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10: Oxidation Resistant High Conductivity Copper Layers For Microelectroni...
Oxidation Resistant High Conductivity Copper Layers For Microelectronic Applications and Process of Making Same Application Type: Divisional Patent Number: 5959358 Country: United ...
URL: https://www.src.org/library/patent/p0054/
Modified: 1999-09-28 - 24KB
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11: Passivated Copper Conductive Layers for Microelectronic Applications...
Passivated Copper Conductive Layers for Microelectronic Applications and Methods of Manufacturing Same Application Type: Utility Patent Number: 5766379 Country: United States ...
URL: https://www.src.org/library/patent/p0015/
Modified: 1998-06-16 - 24KB
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12: Dual Work Function CMOS Gate Technology Based on Metal Interdiffusion...
Dual Work Function CMOS Gate Technology Based on Metal Interdiffusion Application Type: Divisional Patent Number: 7141858 Country: United States Status: Filed on 18-Jun-2004, ...
URL: https://www.src.org/library/patent/p0482/
Modified: 2006-11-28 - 22KB
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13: Dual Work Function CMOS Gate Technology Based on Metal Interdiffusion...
Dual Work Function CMOS Gate Technology Based on Metal Interdiffusion Application Type: Utility Patent Number: 6794234 Country: United States Status: Filed on 9-Dec-2002, Issued on ...
URL: https://www.src.org/library/patent/p0295/
Modified: 2004-09-21 - 22KB
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14: Molecular Transfer Printing Using Block Copolymers (Patent P1163...
Molecular Transfer Printing Using Block Copolymers Application Type: Utility Patent Number: 8133341 Country: United States Status: Filed on 1-Apr-2009, Issued on 13-Mar-2012, ...
URL: https://www.src.org/library/patent/p1163/
Modified: 2012-03-13 - 26KB
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15: Molecular Transfer Printing Using Block Copolymers (Patent P1181...
Molecular Transfer Printing Using Block Copolymers Application Type: Patent Cooperation Treaty Patent Number: PCT/US20090392 Status: Filed on 14-May-2009, Issued on 26-Feb-2011, ...
URL: https://www.src.org/library/patent/p1181/
Modified: 2011-02-26 - 26KB
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16: Supermolecular Structures and Devices Made From Same (Patent...
Supermolecular Structures and Devices Made From Same Application Type: Continuation Patent Number: 6897470 Country: United States Status: Filed on 14-Oct-2003, Issued on ...
URL: https://www.src.org/library/patent/p0425/
Modified: 2005-05-24 - 25KB
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17: Supermolecular Structures and Devices Made from Same (Patent...
Supermolecular Structures and Devices Made from Same Application Type: Foreign National Patent Number: 1230406 Country: Taiwan Status: Filed on 23-Feb-2001, Issued on 1-Apr-2005, ...
URL: https://www.src.org/library/patent/p0229/
Modified: 2005-04-01 - 25KB
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18: Supermolecular Structures and Devices Made from Same (Patent...
Supermolecular Structures and Devices Made from Same Application Type: Utility Patent Number: 6664559 Country: United States Status: Filed on 23-Feb-2000, Issued on 16-Dec-2003, ...
URL: https://www.src.org/library/patent/p0165/
Modified: 2003-12-16 - 25KB
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19: Deterministically Doped Field Effect Devices and Methods of Making...
Deterministically Doped Field Effect Devices and Methods of Making Same Application Type: Continuation (in part) Patent Number: 7015546 Country: United States Status: Filed on ...
URL: https://www.src.org/library/patent/p0417/
Modified: 2006-03-21 - 23KB
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20: Supermolecular Structures and Devices Made From Same (Patent...
Supermolecular Structures and Devices Made From Same Application Type: European Patent Office Patent Number: EP 2 009 699 Country: United Kingdom Status: Filed on 10-Oct-2008, ...
URL: https://www.src.org/library/patent/p1114/
Modified: 2013-04-24 - 25KB
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21: Capacitorless Dram Device on Silicon-On-Insulator Substrate ...
Capacitorless Dram Device on Silicon-On-Insulator Substrate Application Type: Utility Patent Number: 5448513 Country: United States Status: Filed on 2-Dec-1993, Issued on ...
URL: https://www.src.org/library/patent/p0032/
Modified: 1995-09-05 - 25KB
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22: Capacitorless Dram Device on Silicon-On-Insulator Substrate ...
Capacitorless Dram Device on Silicon-On-Insulator Substrate Application Type: European Patent Office Patent Number: 694291064 Status: Filed on 1-Dec-1994, Issued on 14-Nov-2001, ...
URL: https://www.src.org/library/patent/p0287/
Modified: 2001-11-14 - 25KB
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23: Capacitorless Dram Device on Silicon-On-Insulator Substrate ...
Capacitorless Dram Device on Silicon-On-Insulator Substrate Application Type: European Patent Office Patent Number: 0731972 Status: Filed on 1-Dec-1994, Issued on 14-Nov-2001, ...
URL: https://www.src.org/library/patent/p0234/
Modified: 2001-11-14 - 25KB
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24: Non-Crystalline Oxides for Use in Microelectronic, Optical and...
Non-Crystalline Oxides for Use in Microelectronic, Optical and Other Applications Application Type: Foreign National Patent Number: 195870 Country: Taiwan Status: Filed on ...
URL: https://www.src.org/library/patent/p0227/
Modified: 2004-11-02 - 27KB
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25: Novel Non-Crystalline Oxides for Use in Microelectronic, Optical...
Novel Non-Crystalline Oxides for Use in Microelectronic, Optical and Other Applications Application Type: Utility Patent Number: 6787861 Country: United States Status: Filed on ...
URL: https://www.src.org/library/patent/p0225/
Modified: 2004-09-07 - 27KB
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26: Binary Non-Crystalline Oxide Analogs of Silicon Dioxide for Use...
Binary Non-Crystalline Oxide Analogs of Silicon Dioxide for Use in Gate Dielectrics and Methods of Making the Same Application Type: Utility Patent Number: 6552403 Country: United ...
URL: https://www.src.org/library/patent/p0095/
Modified: 2003-04-22 - 24KB
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27: Binary Non-Crystalline Oxide Analogs of Silicon Dioxide for Use...
Binary Non-Crystalline Oxide Analogs of Silicon Dioxide for Use in Gate Dielectrics and Methods of Making the Same Application Type: Foreign National Patent Number: NI180834 ...
URL: https://www.src.org/library/patent/p0220/
Modified: 2003-11-11 - 24KB
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28: Binary Non-Crystalline Oxide Analogs of Silicon Dioxide for Use...
Binary Non-Crystalline Oxide Analogs of Silicon Dioxide for Use in Gate Dielectrics and Methods of Making the Same Application Type: Divisional Patent Number: 6686264 Country: ...
URL: https://www.src.org/library/patent/p0374/
Modified: 2004-02-03 - 24KB
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29: Surface Barrier Silylation of Novolak Film Without Photoactive...
Surface Barrier Silylation of Novolak Film Without Photoactive Additive Patterned with 193 nm Excimer Laser Application Type: Utility Patent Number: 5139925 Country: United States ...
URL: https://www.src.org/library/patent/p0080/
Modified: 1992-08-18 - 20KB
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30: Multi-Layered Attenuated Phase Shift Mask and a Method for Making...
Multi-Layered Attenuated Phase Shift Mask and a Method for Making the Mask Application Type: Utility Patent Number: 5939227 Country: United States Status: Filed on 9-Mar-1998, ...
URL: https://www.src.org/library/patent/p0052/
Modified: 1999-08-17 - 30KB
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1 through 30 of 44 similar documents, best matches first.   
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