Binary Non-Crystalline Oxide Analogs of Silicon Dioxide for Use in Gate Dielectrics and Methods of Making the Same

    • Application Type:
      Utility
      Patent Number:
      6552403
      Country:
      United States
      Status:
      Filed on 5-Nov-1999, Issued on 22-Apr-2003, Patent Expired
      Organization:
      North Carolina State University
      SRC Filing ID:
      P0095

    Inventor

    • Gerald Lucovsky (NC State)

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