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ESH – Environment Safety and Health

Content Type
Events 9
Patent Filings 3

SRC Program
GRC 12

Year
2017 1
2016 2
2015 2
2014 1
2013 1
2012 1
2011 1

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EBSM 12

GRC Science Area
NMS – Nanomanufacturing Sciences 9
ES-H – Environmental Safety & He... 7
MPS – Material & Process Science... 3

1 through 12 of 12 similar documents, best matches first.   
1: ESH Review and (by invitation only) ESH Aspects of Semiconductor...
ESH Review and (by invitation only) ESH Aspects of Semiconductor Manufacturing Research Needs and Opportunities Workshop Date: Wednesday, April 12, 2017, 8 a.m. - Thursday, April ...
URL: https://www.src.org/calendar/e006237/
Modified: 2017-10-13 - 69KB
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2: GRC SEMATECH Engineering Research Center for Environmentally...
GRC SEMATECH Engineering Research Center for Environmentally Benign Semiconductor Manufacturing Site Review Date: Wednesday, March 9, 2011, 8 a.m. - Friday, March 11, 2011, 5 p.m. ...
URL: https://www.src.org/calendar/e003989/
Modified: 2011-09-11 - 73KB
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3: GRC SEMATECH Engineering Research Center for Environmentally...
GRC SEMATECH Engineering Research Center for Environmentally Benign Semiconductor Manufacturing Review Date: Tuesday, March 20, 2012, 4 p.m. - Thursday, March 22, 2012, 2 p.m. MT ...
URL: https://www.src.org/calendar/e004390/
Modified: 2012-09-22 - 78KB
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4: Engineering Research Center for Environmentally Benign Semiconductor...
Engineering Research Center for Environmentally Benign Semiconductor Manufacturing Review Date: Wednesday, March 26, 2014, 7:30 a.m. - Thursday, March 27, 2014, 8 p.m. MT Location: ...
URL: https://www.src.org/calendar/e005160/
Modified: 2014-09-27 - 66KB
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5: Engineering Research Center for Environmentally Benign Semiconductor...
Engineering Research Center for Environmentally Benign Semiconductor Manufacturing Review Date: Wednesday, March 20, 2013, 7 a.m. - Thursday, March 21, 2013, 2 p.m. MT Location: ...
URL: https://www.src.org/calendar/e004929/
Modified: 2013-09-21 - 61KB
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6: Method for Patterning a Radiation Sensitive Layer (Patent P0087...
Method for Patterning a Radiation Sensitive Layer Application Type: Utility Patent Number: 6509138 Country: United States Status: Filed on 12-Jan-2000, Issued on 21-Jan-2003 ...
URL: https://www.src.org/library/patent/p0087/
Modified: 2003-01-21 - 22KB
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7: Solventless, Resistless, Direct Dielectric Patterning (Patent...
Solventless, Resistless, Direct Dielectric Patterning Application Type: Foreign National Patent Number: 171285 Country: Taiwan Status: Filed on 9-Jan-2001, Issued on 2-Jun-2003, ...
URL: https://www.src.org/library/patent/p0207/
Modified: 2003-06-02 - 22KB
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8: Solventless, Resistless, Direct Dielectric Patterning (Patent...
Solventless, Resistless, Direct Dielectric Patterning Application Type: European Patent Office Patent Number: 1269259 Status: Filed on 11-Jan-2001, Issued on 8-Aug-2012, Patent ...
URL: https://www.src.org/library/patent/p0308/
Modified: 2012-08-08 - 22KB
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9: Aquatic Fate and Toxicity of III/V Semiconductor Materials in...
Aquatic Fate and Toxicity of III/V Semiconductor Materials in the Presence of Chemical-Mechanical Planarization Nanoparticles Date: Thursday, Sept. 3, 2015, 2 p.m.-3 p.m. ET ...
URL: https://www.src.org/calendar/e005828/
Modified: 2016-03-03 - 31KB
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10: The Challenges and Opportunities of Atomic Layer Etching (Event...
The Challenges and Opportunities of Atomic Layer Etching Date: Thursday, May 5, 2016, 2 p.m.-3 p.m. ET Location: University of Arizona, Tucson, AZ, United States Type: e-Workshop ...
URL: https://www.src.org/calendar/e005904/
Modified: 2016-11-05 - 34KB
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11: Investigation of Speciation in III-V Wet Etching to Mitigate...
Investigation of Speciation in III-V Wet Etching to Mitigate Hazardous Product Formation Date: Thursday, June 4, 2015, 2 p.m.-3 p.m. ET Location: University of Arizona, Tucson, AZ, ...
URL: https://www.src.org/calendar/e005703/
Modified: 2015-12-04 - 32KB
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12: Engineering Research Center for Environmentally Benign Semiconductor...
Engineering Research Center for Environmentally Benign Semiconductor Manufacturing Review Date: Tuesday, April 5, 2016, 7 a.m.-4:30 p.m. MT Location: Marriott University Park ...
URL: https://www.src.org/calendar/e005906/
Modified: 2016-10-05 - 49KB
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1 through 12 of 12 similar documents, best matches first.