Investigation of Speciation in III‐V Wet Etching to Mitigate Hazardous Product Formation
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- Date:
- Thursday, June 4, 2015, 2 p.m.–3 p.m. ET
- Location:
- University of Arizona, Tucson, AZ, United States
- Type:
- e-Workshop
- Event ID:
- E005703
Professor Anthony Muscat of the University of Arizona, will discuss his research related to task 425.049, in the Environmental, Safety, and Health thrust.
Abstract
As III-V materials become more widely considered for use as semiconductors, the need to understand their processing increases. The objective of this study is to investigate the species formed during a typical wet-etching of III-V materials. InAs samples were etched in 0.1 M HCl and 0.01 M H2O2. The liquid phase was analyzed using ICP-MS to measure the total concentration of indium and arsenic as a function of time. The results showed a 1:1 ratio of indium and arsenic in the liquid phase. Additionally, the concentration data was used to calculate an etching rate of 0.78 ± 0.06 nm/s. A separate etching experiment using profilometry obtained an etching rate of 0.89 ± 0.3 nm/s. Statistical agreement between the etching rates from ICP-MS and profilometry shows that a mass balance was closed around the sample. Furthermore, the concentration data obtained for these experiments indicate that under these conditions all species formed remained in the liquid phase.
Bios
Professor Anthony Muscat is the Head of the Department of Chemical and Environmental Engineering at the University of Arizona. He received his BS in Chemical Engineering from the University of California, Davis, in 1982; his MS and PhD in chemical engineering from Stanford University in 1983 and 1993, respectively, with a stint in between as a postdoc at the Université Laval in Quebec; and a second postdoc assignment at the Massachusetts Institute of Technology. Professor Muscat is the new head of the department of chemical and environmental engineering in the College of Engineering at the University of Arizona. He has received a da Vinci Circle Fellowship from the UA College of Engineering, a Career Award from the National Science Foundation, and an APS Professorship from the Arizona Public Service Power Company. As APS Professor, Muscat has taught undergraduate and graduate classes focused on entrepreneurialism in the UA College of Engineering and Eller College of Management. Outside his office, lab and classroom, Muscat is an avid runner, movie buff and opera fan.
Srini Raghavan is the Professor of Materials Science and Engineering at the University of Arizona. He received his Ph.D. in Materials Science and Mineral Engineering from the University of California, Berkeley in 1976. His areas of research include but are not limited to wet chemical processing in integrated circuit manufacturing. Professor Raghavan’s group has been active in this area for over two decades and focuses on using fundamental principles of colloid, surface and electrochemistry to provide solutions to existing problems and develop new methods, which are environmentally benign.
Tim Corley, Director, Analytical Facilities-Research Support, Hydrology and Water Resources, University of Arizona
Jimmy Hackett, Bing Wu, and Pablo Mancheno, Graduate Students, Chemical and Environmental Engineering, University of Arizona.
Name | Organization |
---|---|
Burdick, Andrew D. | IBM Corporation |
Corley, Timothy L. | University of Arizona |
Eisenbraun, Eric | University at Albany - SUNY |
Hackett, Jimmy L. | University of Arizona |
Han, Zhenxing | Micron Technology, Inc. |
Hooper, Don G. | Intel Corporation |
Hu, Shan | Tokyo Electron Limited (TEL) |
Hurd, Trace Q. | Tokyo Electron Limited (TEL) |
Jiang, Wen | University of California, Los Angeles |
Lin, Sijie | University of California, Los Angeles |
McClure, Karen | University of Arizona |
Muscat, Anthony | University of Arizona |
Osborne, Olivia | University of California, Los Angeles |
Pagano, Rosario | Integrated Device Technology |
Raley, Brian | GlobalFoundries Inc. |
Sankarapandian, Muthumanickam | IBM Corporation |
Shadman, Farhang | University of Arizona |
Sierra Alvarez, Reyes | University of Arizona |
Zeng, Chao | University of Arizona |