GRC SEMATECH Engineering Research Center for Environmentally Benign Semiconductor Manufacturing Review
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- Date:
- Tuesday, March 20, 2012, 4 p.m. — Thursday, March 22, 2012, 2 p.m. MT
- Location:
- Marriott University Park Hotel, Tucson, AZ, United States
- Event ID:
- E004390
Review research results within the ERC for the Environment, Safety, and Health thrust of NMS.
PLEASE NOTE: There will be no remote access to this review due to events beyond our control.
This is a preliminary agenda. Click here to see the most up-to-date agenda.
| Tuesday, March 20, 2012 | ||
|---|---|---|
| 4:00 p.m.- Open | Poster Set-Up | Madera Room |
| Wednesday, March 21, 2012 | ||
| 7:00 - 7:45 AM | Continental Breakfast & Registration (Pima/Sabino Foyer) | |
| 7:30 - 7:50 AM | TAB/PAG Caucus (Ventana Room) | |
| 7:50 - 8:15 AM | Introduction and Overview: Farhang Shadman (Pima/Sabino Rooms) | |
| 8:15 - 8:35 AM | 425.034 – Improvement of ESH Impact of Back End of Line (BEOL) Cleaning Formulations Using Ionic Liquids to Replace Traditional Solvents | Srini Raghavan / University of Arizona |
| 8:35 - 8:55 AM | 425.033 – Development of an All-Wet Benign Process Based on Catalyzed Hydrogen Peroxide (CHP) Chemical System for Stripping of Implanted State-of-the-Art Deep UV Resists | Srini Raghavan / University of Arizona |
| 8:55 - 9:35 AM | 425.032 – Fundamentals of Advanced Planarization: Pad Micro-Texture, Pad Conditioning, Slurry Flow, and Retaining Ring Geometry | Ara Philipossian / University of Arizona Duane Boning / MIT |
| 9:35 - 9:50 AM | Break (Pima/Sabino Foyer) | |
| 9:50 - 10:15 AM | 425.030 and 425.031 – Supercritical Carbon Dioxide Compatible Additives: Design, Synthesis, and Application of an Environmentally Friendly Development Process to Next Generation Lithography | Chris Ober / Cornell Juan dePablo / U. of Wisconsin |
| 10:15 - 10:40 AM | 425.029 – Sugar-Based Photoacid Generators (Sweet PAGs): Environmentally Friendly Materials for Next Generation Photolithography | Chris Ober / Cornell Reyes Sierra / University of Arizona |
| 10:40 - 11:00 AM | 425.026 – Low-ESH-Impact Gate Stack Fabrication by Selective Surface Chemistry | Anthony Muscat / University of Arizona |
| 11:00 - 11:05 AM | Introduction: Projects on ESH Aspects of Nanomaterials | Jim Field / University of Arizona |
| 11:05 - 11:30 AM | 425.023 and 425.024 – Environmental Safety and Health (ESH) Impacts of Emerging Nanoparticles and Byproducts from Semiconductor Manufacturing | Jim Field, Scott Boitano, Reyes Sierra, Farhang Shadman / University of Arizona Buddy Ratner / U. Washington |
| 11:30 - 1:00 PM | Lunch (Canyon Rooms) | |
| 1:00 - 1:25 PM | 425.025 – Development of Quantitative Structure-Activity Relationship for Prediction of Biological Effects of Nanoparticles Associated with Semiconductor Industries | Yongsheng Chen / Georgia Tech Jonathan Posner, Trevor Thornton / Arizona State |
| 1:25 - 1:50 PM | 425.027 – Predicting, Testing, and Neutralizing Nanoparticle Toxicity | Steven Nielsen, Rockford Draper, Paul Pantano, Inga Musselman, Gregg Dieckmann / UT-Dallas |
| 1:50 - 2:15 PM | 425.035 – High-Throughput Cellular-Based Toxicity Assays for Manufactured Nanoparticles and Nanostructure-Toxicity Relationship Models | Alex Tropsha / UNC-Chapel Hill |
| 2:15 - 2:30 PM | Summary of Results and Conclusions of Four Nano-Tox Projects | Jim Field / University of Arizona |
| 2:30 - 2:40 PM | Break (Pima/Sabino Foyer) | |
| 2:40 - 2:55 PM | 425.028 – Lowering the Environmental Impact of High-k and Metal Gate-Stack Surface Preparation Processes | Yoshio Nishi / Stanford Srini Raghavan, Farhang Shadman / University of Arizona Bert Vermeire / Arizona State |
| 2:55 - 3:15 PM | Report on Customized Projects | |
| 3:15 - 3:30 PM | General Discussion | |
| 3:30 - 3:45 PM | Simon Karecki Award Presentation | |
| 3:45 - Open | Poster Session (Madera Room) | |
| 4:30 - 5:15 PM | SRC Student/Industry Networking Event (Madera/Pima Rooms) | |
| 4:30 - Open | Hors d’oeuvres (Madera/Pima Rooms) | |
| 5:00 - Open | Cash Bar (Madera/Pima Rooms) | |
| 5:15 - 7:45 PM | TAB/PAG Caucus w/ working dinner (Sabino Room) | |
| 6:00 - Open | Buffet Dinner (Canyon Foyer & Canyon Rooms) | |
| 7:00 - Open | PIs Group Planning Meetings (Canyon Rooms) | |
| Thursday, March 22, 2012 | ||
| 6:30 - 7:30 AM | Continental Breakfast (Pima/Sabino Foyer) | |
| 7:30 - 7:50 AM | Report on New Proposals and Initiatives | |
| 7:50 - 10:00 AM | Presentation of New Projects | |
| 7:50 - 8:00 AM | 425.037 – Cell-Based Toxicity Assay-on-Chip for the Next-Generation CMOS Technology | Shyam Aravamudhan / NC A&T |
| 8:00 - 8:20 AM | 425.038 – Non-PFC Plasma Chemistries for Patterning Complex Materials and Structures | Jane Pei-Chen Chang / UCLA |
| 8:20 - 8:30 AM | 425.039 – 'Pad-in-a-Bottle': Planarization with Slurries Containing Suspended Polyurethane Beads | Ara Philipossian / University of Arizona |
| 8:30 - 8:40 AM | 425.040 – Detection of Engineered Nanomaterials: Semi-Conductor Facilities and Consumer Devices | Paul Westerhoff / Arizona State |
| 8:40 - 8:55 AM | Break (Pima/Sabino Foyer) | |
| 8:55 - 9:05 AM | 425.041 – Interactions of Chemical Mechanical Planarization Nanoparticles with Model Cell Membranes: Implications for Nanoparticle Toxicity | Kai Loon Chen / Johns Hopkins University |
| 9:05 - 9:15 AM | 425.042 – Dispersion, Bioaccumulation, and Mechanisms of Nanoparticle Toxicity | Steven Nielsen / UT-Dallas |
| 9:15 - 9:25 AM | 425.043 – ESH-Friendly Cleaning and Rinsing of Multi-Material Surfaces and Structures | Farhang Shadman / University of Arizona |
| 9:25 - 9:35 AM | 425.044 – Computer-Aided Design of Nanomaterials with the Desired Bioactivity and Safety Profiles | Alex Tropsha / UNC-Chapel Hill |
| 9:35 - 10:00 AM | Q&A and Comments of New Projects | |
| 10:00 - 11:30 AM | IAB Meeting (TBA) | |
| 11:30 - 12:00 PM | Feedback to PIs (Pima/Sabino Foyer) | |
| 12:00 - Open | Buffet Lunch (Pima/Sabino Foyer & Canyon Rooms) | |
| 12:30 - 2:00 PM | Executive Advisory Board Meeting (Board Room) | |
| 2:00 PM | Program End | |
Hotel and Logistics
Marriott University Park Hotel
880 East Second Street
Tucson, AZ 85719
Marriott Central Reservations: (866) 596-7897
Phone: (520) 792-4100
Fax: (520) 903-9906
Group Name: ERC Review Conference
Room Rate: $184.00/night (single/double occupancy) plus tax
Release Date: extended to March 16, 2012
On-Line Registration
Transportation and Airport Information
Tucson International Airport - TUS (8 mi E) Take Tucson Blvd to Kino Pkwy; turn right on Kino to Broadway; turn left on Broadway to Euclid; turn right on Euclid to 2nd St.; turn right on 2nd St. Hotel is on the right; parking garage is on left.
Phoenix Sky Harbor International Airport- PHX (114 mi E) Take I-10 Southbound to Tucson; take Speedway exit, turn left (east) onto Speedway Blvd. Turn right on Euclid Avenue to Second Street. Turn left on Second Street. Hotel is at corner of Tyndall and Second Streets.
Other transportation and parking information is available upon request by sending an email to Karen McClure, On Site Coordinator.
Campus and Area Information
Information about Arizona can be found at the Arizona Office of Tourism.
| Name | Organization | Attend: On-Site or Remote? |
|---|---|---|
| Aravamudhan, Shyam | North Carolina A&T State University | On-Site |
| Arrandale, Mayrita | Atotech | On-Site |
| Bajaj, Rajeev | Applied Materials, Inc. | On-Site |
| Balachandran, Rajesh | University of Arizona | On-Site |
| Beck, Mark J | ProSys, Inc. | On-Site |
| Blackford, David | Kanomax FMT, Inc. | On-Site |
| Boitano, Scott | University of Arizona | On-Site |
| Boning, Duane | Massachusetts Institute of Technology | On-Site |
| Borucki, Leonard J. | Araca Inc. | On-Site |
| Bowling, Allen | Texas Instruments Incorporated | On-Site |
| Brown, Ian | Tokyo Electron Limited (TEL) | On-Site |
| Bucciarelli, John | Freescale Semiconductor, Inc. | On-Site |
| Burnham, Marie | Freescale Semiconductor, Inc. | On-Site |
| Bushdiecker, David | University of Texas at Dallas | On-Site |
| Chang, Jane | University of California, Los Angeles | On-Site |
| Chasey, Allan D. | Arizona State University | On-Site |
| Chen, Yongsheng | Georgia Institute of Technology | On-Site |
| Chiang, Chieh-Chun | University of Arizona | On-Site |
| Chin, Barry | Applied Materials, Inc. | On-Site |
| Cole, Jack R. | Morgan Advanced Materials | On-Site |
| Conner, Gregg | Entegris, Inc. | On-Site |
| Content, Reed M. | GlobalFoundries Inc. | On-Site |
| Daj, Reza | University of Arizona | On-Site |
| Daneshvar, Rosa | University of Washington | On-Site |
| Dittler, Roy | University of Arizona | On-Site |
| Doudrick, Kyle | Arizona State University | On-Site |
| Draper, Rockford | University of Texas at Dallas | On-Site |
| Ela, Wendell P. | University of Arizona | On-Site |
| Fan, Wei | Massachusetts Institute of Technology | On-Site |
| Field, Jim | University of Arizona | On-Site |
| Foley, Alicia | University of Arizona | On-Site |
| Fuerst, Avi | Intel Corporation | On-Site |
| Geisert, Carl E. | Intel Corporation | On-Site |
| Gonzalez Estrella, Jorge | University of Arizona | On-Site |
| Gotlinsky, Barry | Pall Corporation | On-Site |
| Granados-Alpizar, Bernal | University of Arizona | On-Site |
| Guzman, Roberto | University of Arizona | On-Site |
| Han, Zhenxing | University of Arizona | On-Site |
| Harman, David E. | Intel Corporation | On-Site |
| Havemann, Robert H. | Semiconductor Research Corporation | On-Site |
| Hooper, Don G. | Intel Corporation | On-Site |
| Hughes, Stan | Applied Materials, Inc. | On-Site |
| Hughes, Tyler B. | University of Texas at Dallas | On-Site |
| Jain, Rahul | University of Arizona | On-Site |
| Jiao, Yubo | University of Arizona | On-Site |
| Johnson, Joy | Massachusetts Institute of Technology | On-Site |
| Jones, Lisa A | University of Arizona | On-Site |
| Kenny, Leo T. | Intel Corporation | On-Site |
| Keswani, Manish K. | University of Arizona | On-Site |
| Kwong, Hsi-An | SEMATECH | On-Site |
| Lan, Michelle | Applied Materials, Inc. | Remote |
| Lee, Chris S. | Texas Instruments Incorporated | On-Site |
| Lee, Sungyun | Arizona State University | On-Site |
| Li, Kungang | Georgia Institute of Technology | On-Site |
| Liao, Xiaoyan | University of Arizona | On-Site |
| Mahdavi, Omid | University of Arizona | On-Site |
| Marchack, Nathan | University of California, Los Angeles | On-Site |
| McBride, Michael | University of Arizona | On-Site |
| McClure, Karen | University of Arizona | On-Site |
| Miller, Shawn | University of Arizona | On-Site |
| Moinpour, Mansour | Intel Corporation | On-Site |
| Morgan, John W. | H2Morgan LLC | On-Site |
| Muscat, Anthony | University of Arizona | On-Site |
| Musselman, Inga | University of Texas at Dallas | On-Site |
| Nielsen, Steven | University of Texas at Dallas | On-Site |
| Ober, Christopher K. | Cornell University | On-Site |
| O'Dwyer, Brian C. | Intel Corporation | On-Site |
| Ojerholm, Peter V. | EHWA Diamond | On-Site |
| Olivares, Christopher | University of Arizona | On-Site |
| Otero-Gonzalez, Lila | University of Arizona | On-Site |
| Philipossian, Ara | University of Arizona | On-Site |
| Posner, Jonathan | Arizona State University | On-Site |
| Raghavan, Srini | University of Arizona | On-Site |
| Raley, Brian | GlobalFoundries Inc. | On-Site |
| Ranatunga, Udayana | University of Texas at Dallas | On-Site |
| Rao, Gopal | Intel Corporation | On-Site |
| Ratner, Buddy | University of Washington | On-Site |
| Ren, He | University of Wisconsin - Madison | On-Site |
| Rich, MaryLisabeth | Semiconductor Research Corporation | On-Site |
| Rosales-Yeomans, Daniel | Intel Corporation | On-Site |
| Rottman, Jeffrey | University of Arizona | On-Site |
| Ryan, Michael | Intel Corporation | On-Site |
| Sampurno, Yasa | University of Arizona | On-Site |
| Shadman, Farhang | University of Arizona | On-Site |
| Sherwood, Cara L. | University of Arizona | On-Site |
| Sierra Alvarez, Reyes | University of Arizona | On-Site |
| Small, Robert | RS Associates | On-Site |
| Speed, David E. | IBM Corporation | On-Site |
| Sudargho, Fransisca | Araca Inc. | On-Site |
| Sun, Wenjie | University of Arizona | On-Site |
| Taubert, Jenny | University of Arizona | On-Site |
| Tibensky, Ludovit | ON Semiconductor | On-Site |
| Trantien, Minh | Applied Materials, Inc. | On-Site |
| Tropsha, Alexander | University of North Carolina at Chapel Hill | On-Site |
| Usmani, Saifi | DuPont Air Products NanoMaterials, LLC | On-Site |
| Vandentop, Gilroy J. | Intel Corporation | On-Site |
| Wang, Hao | University of Arizona | On-Site |
| Westerhoff, Paul | Arizona State University | On-Site |
| Wu, Changhong | University of Arizona | On-Site |
| Yao, Junpin | Matheson | On-Site |
| Yap, Catherine | Araca Inc. | On-Site |
| Yap, Michelle | Araca Inc. | On-Site |
| Yeakley, Tim S. | Texas Instruments Incorporated | On-Site |
| Yi, Peng | Johns Hopkins University | On-Site |
| Zamani, Davoud | University of Arizona | On-Site |
| Zhuang, Yun | University of Arizona | On-Site |
| Date | Event Summary |
|---|---|
|
21
March 2012
GRC GRC | GRC SEMATECH Student/Industry Networking Event Wednesday, March 21, 2012, 4:30 p.m.–5:15 p.m. MT Tucson, AZ, United States |
SEMATECH
