Systems, Methods and Computer Program Products for Detecting the Position of a New Alignment Mark on a Substrate Based on Fitting to Sample Alignment Signals

• Application Type:

  Utility

  Patent Number:

  6064486

  Country:

  United States

  Status:

  Filed on 21-May-1998, Issued on 16-May-2000, Patent Expired

  Organization:

  Stanford University

  SRC Filing ID:

  P0047

Inventors

• Xun Chen (Stanford)
• Amir Ghazanfarian (Stanford)
• Mark Mccord (Stanford)
• R. Fabian W. Pease (Stanford)
• Thomas Kailath (Stanford)