Selective Germanium Deposition on Silicon and Resulting Structures

• Application Type:

  Utility

  Patent Number:

  5089872

  Country:

  United States

  Status:

  Filed on 27-Apr-1990, Issued on 18-Feb-1992, Patent Expired

  Organization:

  North Carolina State University

  SRC Filing ID:

  P0101

Inventors

• Mehmet Ozturk (NC State)
• Jimmie J. Wortman (NC State)
• Douglas Grider (NC State)