Process and Apparatus for the Use of Solid Precursor Sources in Liquid Form for Vapor Deposition of Materials

• Application Type:

  Utility

  Patent Number:

  5376409

  Country:

  United States

  Status:

  Filed on 21-Dec-1992, Issued on 27-Dec-1994, Patent Expired

  Organization:

  University at Albany - SUNY

  SRC Filing ID:

  P0261

Inventors

• Eric Eisenbraun (SUNY Albany)
• Alain E. Kaloyeros (SUNY Albany)