Optical Waveguides Formed From Nano Air-Gap Inter-Layer Dielectric Materials and Methods of Fabrication Thereof
Inventors
- Paul A. Kohl (Georgia Tech)
- James D. Meindl (Georgia Tech)
- Sue Ann Bidstrup Allen (Georgia Tech)
- Tony Victor Mule (Georgia Tech)
- Thomas K. Gaylord (Georgia Tech)
- Elias N. Glytsis (Georgia Tech)