Method and Apparatus for Detecting Lithographic Hotspots in a Circuit Layout

• Application Type:

  Utility

  Patent Number:

  7945870

  Country:

  United States

  Status:

  Filed on 19-Mar-2007, Issued on 17-May-2011, Patent Abandoned

  Organization:

  University of California, San Diego

  SRC Filing ID:

  P0658

Inventors

• Andrew Kahng (UC/San Diego)
• Chul Hong Park (UC/San Diego)
• Xu Xu (UC/San Diego)