Method, Apparatus and System for Designing an Integrated Circuit Including Circuit Including Generating at Least One Auxiliary Pattern for Cell-Based Optical Proximity Correction

• Application Type:

  Utility

  Patent Number:

  7873929

  Country:

  United States

  Status:

  Filed on 14-Aug-2007, Issued on 18-Jan-2011, Patent Abandoned

  Organization:

  University of California, San Diego

  SRC Filing ID:

  P1029

Inventors

• Andrew Kahng (UC/San Diego)
• Chul Hong Park (UC/San Diego)

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