Wafer Fabrication Monitoring/Control System and Method

    • Application Type:
      Utility
      Patent Number:
      9366601
      Country:
      United States
      Status:
      Filed on 15-Mar-2012, Issued on 14-Jun-2016
      Organization:
      University of North Texas
      SRC Filing ID:
      P1332

    Inventors

    • Oliver Chyan (Univ. of North Texas)
    • Jin-Jian Chen (Univ. of North Texas)

    Related Patents

    P1316
    Application Expired
    GRC

    Wafer Fabrication Monitoring/Control System and Method

    Jin-Jian Chen (Univ. of North Texas); Oliver Chyan (Univ. of North Texas)
    Patent Application Expired
    Application Type: Provisional

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