Unreleased MEMS Resonators and Methods of Forming Same

    • Application Type:
      Utility
      Patent Number:
      9041492
      Country:
      United States
      Status:
      Filed on 30-Apr-2012, Issued on 26-May-2015, Patent Abandoned
      Organization:
      Massachusetts Institute of Technology
      SRC Filing ID:
      P1336

    Inventors

    • Wentao Wang (MIT)
    • Dana Weinstein (MIT)

    Related Patents

    P1280
    Application Expired
    FCRP

    Unreleased MEMS Resonators Using Acoustic Bragg Reflectors (ABRs)

    Wentao Wang (MIT); Dana Weinstein (MIT)
    Patent Application Expired
    Application Type: Provisional

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