Low Temperature Atomic Layer Deposition of Oxides on Compound Semiconductors

    • Application Type:
      Utility
      Patent Number:
      10134585
      Country:
      United States
      Status:
      Filed on 19-Aug-2015, Issued on 20-Nov-2018
      Organization:
      University of California, San Diego
      SRC Filing ID:
      P1554

    Inventors

    • Kasra Sardashti (UC/San Diego)
    • Tobin Kaufman-Osborn (Applied)
    • Tyler Kent (UC/San Diego)
    • Andrew Kummel (UC/San Diego)

    Related Patents

    P1513
    Application Expired
    STARnet

    Low Temperature Atomic Layer Deposition of Al2O3 and HfO2 on Silicon-Germanium

    Tobin Kaufman-Osborn (Applied); Tyler Kent (UC/San Diego); Andrew Kummel (UC/San Diego); Kasra Sardashti (UC/San Diego)
    Patent Application Expired
    Application Type: Provisional

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