Method for ALD Deposition on Inert Surfaces Via Al203 Nanoparticles

    • Application Type:
      Utility
      Patent Number:
      11127590
      Country:
      United States
      Status:
      Filed on 5-Dec-2017, Issued on 21-Sep-2021
      Organization:
      University of California, San Diego
      SRC Filing ID:
      P1750

    Inventors

    • Andrew Kummel (UC/San Diego)
    • Iljo Kwak (UC/San Diego)
    • Kasra Sardashti (UC/San Diego)

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