Quantitative Non-destructive Nanometrology of Interfacial Reactions and Diffusion in Buried Nanostructures

  • Authors:
    Elisabeth R. Shanblatt (U. of Colorado/Boulder), Christina L. Porter (U. of Colorado/Boulder), Dennis F. Gardner (U. of Colorado/Boulder), Giulia F. Mancini (U. of Colorado/Boulder), Robert M. Karl (U. of Colorado/Boulder), Michael Tanksalvala (U. of Colorado/Boulder), Charles Bevis (U. of Colorado/Boulder), Victor H. Vartanian (SEMATECH), Henry Kapteyn (U. of Colorado/Boulder), Daniel Adams (U. of Colorado/Boulder), Margaret Murnane (U. of Colorado/Boulder)
    Publication ID:
    Publication Type:
    Received Date:
    Last Edit Date:
    2443.001 (University of Colorado/Boulder)


Characterizing buried layers and interfaces is critical for a host of applications in nanoscience and nano-manufacturing. Here we demonstrate non-invasive, non-destructive imaging of buried interfaces using a tabletop, extreme ultraviolet (EUV), coherent diffractive imaging (CDI) nanoscope. Copper nanostructures inlaid in SiO2 are coated with 100 nm of aluminum, which is opaque to visible light and thick enough that neither optical microscopy nor atomic force microscopy can image the buried interfaces. Short wavelength (29 nm) high harmonic light can penetrate the aluminum layer, yielding high-contrast images of the buried structures. Moreover, differences in the absolute reflectivity of the interfaces before and after coating reveal the formation of interfacial diffusion and oxidation layers at the Al-Cu and Al-SiO2 boundaries. Finally, we show that EUV CDI provides a unique capability for quantitative, chemically-specific imaging of buried structures, and the material evolution that occurs at these buried interfaces, compared with all other approaches.

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