Quantitative Chemically-Specific Imaging of Reactions at Buried Interfaces with few-nm Precision

  • Authors:
    Margaret Murnane (U. of Colorado/Boulder)
    Publication ID:
    Publication Type:
    Deliverable Report
    Received Date:
    Last Edit Date:
    2443.001 (University of Colorado/Boulder)

Research Report Highlight

Among many breakthroughs, researchers demonstrated on industry samples record imaging of 13.5 nm spatial resolution for any light source in coherent diffractive imaging.


In our industry sample report, we show four big breakthroughs enabled by DARPA, SRC and other funding -
• We demonstrate high-quality images of periodic samples
• We achieve record imaging at 13.5nm for ANY light source, at 12.4nm or 0.9 lamda
• KMLabs and JILA worked together to enhance the 13.5nm flux so now we can really make rapid progress
• We also demonstrated quantitative, chemically-specific, coherent diffractive imaging of reactions at buried interfaces with few-nanometer precision using spatially coherent high harmonic beams. Copper nanostructures are coated with 100nm of aluminum, which is opaque to visible light and thick enough that neither optical nor atomic force microscopy can image the buried interface. EUV high harmonic beams can penetrate the aluminum, yielding high-contrast images of the buried structures. EUV light is extremely sensitive to the formation of multiple oxide layers, as well as interdiffusion of materials occurring at the metal-metal and metal-insulator boundaries deep within the nanostructure, with few nm precision.

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