Impacts of CMP Nanoparticles on the Cytotoxicity of Soluble III/V Species to Human Lung Cells
Planarization of III/V thin films can potentially result in the release of soluble arsenic, indium and gallium species into CMP effluents. This work investigated the cytotoxicity of soluble III/V species to 16HBE14o- human lung bronchial epithelial cells in the presence and absence of engineered nanoparticles commonly used in CMP processes (fumed SiO2, precipitated SiO2, CeO2 and Al2O3). Cytoxicity assessment was performed using a high throughput, impedance-based real-time cell analyzer (RTCA) test system. The results obtained demonstrated that trivalent indium and gallium displayed low toxicity compared to inorganic arsenic species (e.g., arsenite and arsenate). Furthermore, results showed that adsorption of soluble III/V species onto the surface of CMP nanoparticles can affect their fate, bioavailability and toxicity.
|Impacts of CMP Nanoparticles on the Cytotoxicity of Soluble III/V Species to Human Lung Cells|
Thursday, March 2, 2017, 2 p.m.–3 p.m. ET
Tucson, AZ, United States