Understanding the Physicochemical Properties, Behavior and Toxicity Threshold Limit of Bound and Unbound Engineered Nanomaterials
In this presentation, the following tasks are addressed: (a) transformation of CMP spent slurry and NP waste under varying CMP conditions, (b) Arsenic speciation and mass balance studies, (c) incidental particles during CMP and tool cleaning and (d) mechanism studies and in vitro toxicity (IC50) of NP slurries before and after CMP.
|ESH Review and (by invitation only) ESH Aspects of Semiconductor Manufacturing Research Needs and Opportunities Workshop|
Wednesday, April 12, 2017, 8 a.m. — Thursday, April 13, 2017, 5 p.m. PT
Tucson, AZ, United States
The ESH review is being held to provide an annual contract review and project guidance by GRC Members within the ESH thrust of NMS. Additionally, an invitation only 1.5 day ...