Sub-thermal Subthreshold Characteristics in Top-down InGaAs/InAs Heterojunction Vertical Nanowire Tunnel FETs
This work demonstrates top-down InGaAs/InAs heterojunction vertical nanowire Tunnel FETs with sub-thermal subthreshold characteristics over two orders of magnitude of current. A minimal subthreshold swing of 53 mV/dec at Vds = 0.3 V has been obtained at room temperature. An I 60 (defined as the highest current level where the subthreshold characteristics exhibit a transition from sub- to super-60 mV/dec behavior) of 4.3 nA/ μm has been achieved at Vds = 0.3 V. Compared to an earlier device generation, much reduced temperature dependence of the subthreshold characteristics is observed in this work. The major difference between the two device generations is the drastically reduced interface trap density, evidenced by the improvement in the subthreshold swing of InGaAs vertical nanowire MOSFETs fabricated at the same time. This result suggests oxide-semiconductor interface trap-assisted tunneling the main leakage mechanism in III-V TFETs fabricated by our process. The improvement in the interface quality has been enabled by improved gate oxide deposition and post-deposition treatment.