Characterization of Mechanical Properties of Passivated Metal Lines

  • Authors:
    Ganesh Subbarayan (Purdue), Chun-Pei Chen (Purdue), Pavan Kumar Vaithees (Purdue)
    Publication ID:
    Publication Type:
    Annual Review
    Received Date:
    Last Edit Date:
    2652.001 (Purdue University)


We summarized our progress in estimating the yield strength of Al line in ILD stack, modeling Al ratcheting behavior with large number of thermal cycles, and evaluating the risk of line ratcheting and low cycle fatigue due to power cycle.

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