Characterization of Mechanical Properties of Passivated Metal Lines

  • Authors:
    Ganesh Subbarayan (Purdue), Chun-Pei Chen (Purdue), Pavan Kumar Vaithees (Purdue)
    Publication ID:
    P091101
    Publication Type:
    Annual Review
    Received Date:
    11-Jun-2017
    Last Edit Date:
    12-Jun-2017
    Research:
    2652.001 (Purdue University)

Abstract

We summarized our progress in estimating the yield strength of Al line in ILD stack, modeling Al ratcheting behavior with large number of thermal cycles, and evaluating the risk of line ratcheting and low cycle fatigue due to power cycle.

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