Decoupled Process Sequences/Surface Chemistries Enabling Atomic Layer Etching of Critical Materials

  • Authors:
    Gottlieb Oehrlein (UM/College Park)
    Publication ID:
    P091136
    Publication Type:
    Annual Review
    Received Date:
    20-Jun-2017
    Last Edit Date:
    26-Jun-2017
    Research:
    2726.001 (University of Maryland/College Park)

Abstract

This annual report outlines research accomplishments and plans for future work.

Past Events

  Event Summary
27–28 June 2017
GRC
GRC
Nanomanufacturing Materials and Processes (NMP) Review
Tuesday, June 27, 2017, 8 a.m. — Wednesday, June 28, 2017, 5 p.m. PT
Stanford, CA, United States

4819 Emperor Blvd, Suite 300 Durham, NC 27703 Voice: (919) 941-9400 Fax: (919) 941-9450