Defect Removal Process for Area Selective Atomic Layer Deposition

  • Authors:
    Stacey F. Bent (Stanford), Dara Bobb-Semple (Stanford), Tzu-Ling Liu (Stanford)
    Publication ID:
    P091142
    Publication Type:
    Annual Review
    Received Date:
    21-Jun-2017
    Last Edit Date:
    17-Jul-2017
    Research:
    2660.001 (Stanford University)

Abstract

This annual report outlines research accomplishments and plans for future work.

Past Events

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27–28 June 2017
GRC
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Nanomanufacturing Materials and Processes (NMP) Review
Tuesday, June 27, 2017, 8 a.m. — Wednesday, June 28, 2017, 5 p.m. PT
Stanford, CA, United States

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