In situ STM Characterization of ALD Nucleation

  • Authors:
    Yonas Yemane (Stanford), Ming Rue Dickson Thian (Stanford), Friedrich B. Prinz (Stanford)
    Publication ID:
    P091165
    Publication Type:
    Annual Review
    Received Date:
    26-Jun-2017
    Last Edit Date:
    26-Jun-2017
    Research:
    2454.001 (Stanford University)

Abstract

This is a presentation summarizing the completed SRC project to study the nucleation phase of metallic thin film growth.

Past Events

  Event Summary
27–28 June 2017
GRC
GRC
Nanomanufacturing Materials and Processes (NMP) Review
Tuesday, June 27, 2017, 8 a.m. — Wednesday, June 28, 2017, 5 p.m. PT
Stanford, CA, United States

4819 Emperor Blvd, Suite 300 Durham, NC 27703 Voice: (919) 941-9400 Fax: (919) 941-9450