Final Report on Hybrid Nano-Building Blocks for Pixelated EUV Photoresists and Dielectric Thin-Films

  • Authors:
    Mark F. Roll (Univ. of Idaho), Brandon T. Hardie (Univ. of Idaho)
    Publication ID:
    P091231
    Publication Type:
    Deliverable Report
    Received Date:
    30-Jun-2017
    Last Edit Date:
    30-Aug-2017
    Research:
    2439.001 (University of Idaho)

Research Report Highlight

Final report summarizes the progress of task, citing significant changes in task direction, key outcomes, and future directions. Although not decisively shown, polyoxometalates do appear to offer opportunities as resist modifiers.

Abstract

This final deliverables report summarizes the progress of task 2439.001, citing significant changes in task direction, key outcomes, and future directions.

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