Electrostatically-Actuated Structures for Fluid Property Measurements and Related Methods

• Application Type:

  Utility

  Patent Number:

  5955659

  Country:

  United States

  Status:

  Filed on 13-Jan-1998, Issued on 21-Sep-1999, Patent Expired

  Organization:

  Massachusetts Institute of Technology

  SRC Filing ID:

  P0053

Inventors

• Rajesh K. Gupta (MIT)
• Stephen D. Senturia (MIT)