Ultraminiature Pressure Sensor and Method of Making Same

• Application Type:

  Utility

  Patent Number:

  4881410

  Country:

  United States

  Status:

  Filed on 4-May-1988, Issued on 21-Nov-1989, Patent Expired

  Organization:

  University of Michigan - Ann Arbor

  SRC Filing ID:

  P0118

Inventors

• Kensall D. Wise (Univ. of Michigan)
• L. Chau (Univ. of Michigan)