Ultraminiatuure Pressure Sensor with Addressable Read-Out Circuit

• Application Type:

  Utility

  Patent Number:

  5113868

  Country:

  United States

  Status:

  Filed on 21-Dec-1990, Issued on 19-May-1992, Patent Expired

  Organization:

  University of Michigan - Ann Arbor

  SRC Filing ID:

  P0153

Inventors

• Kensall D. Wise (Univ. of Michigan)
• L. Chau (Univ. of Michigan)