Ultra Thin Dielectric for Electronic Devices and Method of Making Same

• Application Type:

  Divisional

  Patent Number:

  5578848

  Country:

  United States

  Status:

  Filed on 18-Sep-1995, Issued on 26-Nov-1996, Patent Abandoned

  Organization:

  University of Texas at Austin

  SRC Filing ID:

  P0177

Inventors

• Dim-Lee Kwong (UT/Austin)
• Giwan W. Yoon (UT/Austin)
• Jonghan Kim (UT/Austin)
• Liang-Kai Han (UT/Austin)
• Jiang Yan (UT/Austin)