Use of Diffracted Light from Latent Images in Photoresist for Optimizing Image Contrast

• Application Type:

  Utility

  Patent Number:

  5830611

  Country:

  United States

  Status:

  Filed on 5-Mar-1992, Issued on 3-Nov-1998, Patent Expired

  Organization:

  University of New Mexico

  SRC Filing ID:

  P0254

Inventors

• Kenneth Bishop (Univ. of New Mexico)
• Lisa Milner (Univ. of New Mexico)
• Syed Sohail Hu Naqvi (Univ. of New Mexico)
• John R. McNeil (Univ. of New Mexico)