Multiple-Thickness Gate Oxide Formed by Oxygen Implantation - device claims

    • Application Type:
      Utility
      Patent Number:
      6855994
      Country:
      United States
      Status:
      Filed on 5-Sep-2001, Issued on 15-Feb-2005, Patent Abandoned
      Organization:
      University of California, Berkeley
      SRC Filing ID:
      P0259

    Inventors

    • Chenming Hu (UC/Berkeley)
    • Tsu-Jae Liu (UC/Berkeley)

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