Electrical Device Including Dielectric Layer Formed By Direct Patterning Process

• Application Type:

  Divisional

  Patent Number:

  6946736

  Country:

  United States

  Status:

  Filed on 23-Oct-2002, Issued on 20-Sep-2005, Patent Abandoned

  Organization:

  Massachusetts Institute of Technology

  SRC Filing ID:

  P0327

Inventors

• Karen K. Gleason (MIT)
• Daniel J. C. Herr (SRC)
• Christopher K. Ober (Cornell)