Cyclic Thermal Anneal for Dislocation Reduction

• Application Type:

  Foreign National

  Patent Number:

  139204

  Country:

  Taiwan

  Status:

  Filed on 26-Jun-2000, Issued on 17-Dec-2001

  Organization:

  Massachusetts Institute of Technology

  SRC Filing ID:

  P0334

Inventors

• Lionel C. Kimerling (MIT)
• Hsin-Chiao Luan (MIT)