Organoelement Resists for EUV Lithography and Methods of Making the Same

• Application Type:

  Utility

  Patent Number:

  7326514

  Country:

  United States

  Status:

  Filed on 12-Mar-2004, Issued on 5-Feb-2008

  Organization:

  University of Wisconsin - Madison

  SRC Filing ID:

  P0446

Inventors

• Franco Cerrina (U of Wisconsin/Madison)
• Junyan Dai (Cornell)
• Christopher K. Ober (Cornell)
• Lin Wang (U of Wisconsin/Madison)
• Paul Nealey (U of Wisconsin/Madison)