Method and System for Performing Optical Proximity Correction with Process Variations Considerations

    • Application Type:
      Utility
      Patent Number:
      7711504
      Country:
      United States
      Status:
      Filed on 25-Oct-2007, Issued on 4-May-2010, Patent Abandoned
      Organization:
      University of Texas at Austin
      SRC Filing ID:
      P1031

    Inventors

    • David Z. Pan (UT/Austin)
    • Peng Yu (UT/Austin)

    Related Patents

    P1084
    Application Expired
    GRC

    Apparatus and Method for Optical Proximity Correction under Process Variations

    David Z. Pan (UT/Austin); Peng Yu (UT/Austin)
    Patent Application Expired
    Application Type: Provisional

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