Methods and Apparatuses for Integrated Packaging of Microelectromechanical Devices
Inventors
- Donald P. Butler (UT/Arlington)
- Zeynep Celik-Butler (UT/Arlington)
- Mohammad S. Rahman (UT/Arlington)
- Murali M. Chitteboyina (UT/Arlington)
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Application Type: Provisional
Methods and Apparatuses for Integrated Packaging of Microelectromechanical Devices
Donald P. Butler (UT/Arlington); Zeynep Celik-Butler (UT/Arlington); Murali M. Chitteboyina (UT/Arlington); Mohammad S. Rahman (UT/Arlington)Patent Application Abandoned
Application Type: Divisional