Enhanced Stripping of Implanted Resists

    • Application Type:
      Utility
      Patent Number:
      8772170
      Country:
      United States
      Status:
      Filed on 29-Dec-2010, Issued on 8-Jul-2014
      Organization:
      University of Arizona
      SRC Filing ID:
      P1259

    Inventors

    • Srini Raghavan (Univ. of Arizona)
    • Rajkumar Govindarajan (Univ. of Arizona)
    • Manish K. Keswani (Univ. of Arizona)

    Related Publication

    Related Patents

    P1267
    Application Expired
    GRC

    Use of Catalyzed Hydrogen Peroxide (CHP) Chemical System for Stripping of Implanted State-of-the-Art Deep UV Resists

    Rajkumar Govindarajan (Univ. of Arizona); Manish K. Keswani (Univ. of Arizona); Srini Raghavan (Univ. of Arizona)
    Patent Application Expired
    Application Type: Provisional

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