Enhanced Stripping of Implanted Resists
Inventors
- Srini Raghavan (Univ. of Arizona)
- Rajkumar Govindarajan (Univ. of Arizona)
- Manish K. Keswani (Univ. of Arizona)
Related Patents
Use of Catalyzed Hydrogen Peroxide (CHP) Chemical System for Stripping of Implanted State-of-the-Art Deep UV Resists
Rajkumar Govindarajan (Univ. of Arizona); Manish K. Keswani (Univ. of Arizona); Srini Raghavan (Univ. of Arizona)Patent Application Expired
Application Type: Provisional