Multiple Copolymer Systems as Templates for Block Copolymer Nanolithography
Inventors
- Chuanbing Tang (USC/Columbia)
- Christopher Hardy (USC/Columbia)
- Alper Nese (USC/Columbia)
- Jeffery H. Hayat (USC/Columbia)
Related Patents
Multiple Copolymer Systems as Templates for Block Copolymer Nanolithography
Christopher Hardy (USC/Columbia); Jeffery H. Hayat (USC/Columbia); Alper Nese (USC/Columbia); Chuanbing Tang (USC/Columbia)Patent Application Expired
Application Type: Provisional