Crystallographic Orientations of Ruthenium Films

• Application Type:

  Utility

  Patent Number:

  11410931

  Country:

  United States

  Status:

  Filed on 9-Jun-2020, Published by Patent Office

  Organization:

  University of Central Florida

  SRC Filing ID:

  P1898

Inventors

• Kevin R. Coffey (Central Florida)
• Sameer S. Ezzat (Central Florida)
• Katayun Barmak (Columbia)