Questions?
[x] SRC Program
GRC

[x] GRC Science Area
NMS – Nanomanufacturing Sciences

Content Type
Events 22
Patent Filings 2
Other 1

Year
2016 1
2014 1
2013 1
2012 2
2011 3
2010 14

Center
EBSM 6
ACE4S 1
C-SPIN 1
CAIST 1
CDADIC 1
CEMPI 1
CHIRP 1
CNFD 1
IPC 1
NCRC 1
NRI-NSF 1
TxACE 1

Thrust/Theme
ESH – Environment Safety and Hea... 6
NEM – Nanoengineered Materials 6
PAT – Patterning 3
FACSYS – Factory Systems 2
ADS – Alternative Device Structu... 1
AIHW – Artificial Intelligence H... 1
AMS – Analog and Mixed-Signal De... 1
AMS-CSD – Analog/Mixed-Signal Ci... 1
AdvTech – Advanced Technology 1
Advanced Bipolar SOI-MOS Transis... 1
Advanced Devices 1
Advanced Devices & Technologies 1
Advanced Technology Option 1
Analysis Design & Simulation 1
BEP – Back End Processes 1
Back End Processes 1
C&S – Controls and Sensing 1
CADT – Computer-Aided Design and... 1
CD – Circuit Design 1
CFM&TCM – CFM & Total Chemical M... 1
CM – Compact Modeling 1
CSR – Cross-Disciplinary Semicon... 1
Contamination Control 1
Cost Reduction 1
DCMOS – Digital CMOS Technologie... 1
DE – Design Environment 1
DSMS – Device Sciences Modeling ... 1
DV – Design Verification 1
Defect Reduction 1
Deposition 1
DesSyn – Design Synthesis 1
DesTech – Design Techniques 1
Doping Technologies 1
EP3C – Efficiency and Performanc... 1
Equip Automation & Process Contr... 1
Equip – Equipment 1
Equip. Auto. and Process Control 1
FAM – Factory Automation & Manag... 1
FEOL – FEOL Processes 1
FacOps – Factory Operations 1
Factory Systems 1
Front End Processes 1
HWS – Hardware Security 1
Heat Signal & Power Distribution 1
Heat Signal Power 1
I3T – Innovative and Intelligent... 1
ISD – Integrated System Design 1
Interconnect Architecture 1
LMD – Logic and Memory Devices 1
LPD – Logic & Physical Design 1
Lithography 1
Logic Design 1
Logistics & Modeling/Simulation 1
MT – Memory Technologies 1
MTMP – Metrology Tools Matls & P... 1
Masks 1
Materials 1
Materials & Measurements 1
Metrology 1
Modeling & Simulation 1
Modeling & TCAD 1
Multi-level Interconnect 1
NCR – Non-Classical CMOS Researc... 1
NMP – Nanomanufacturing Material... 1
PKG – Packaging 1
PMM – Packaging Materials and Me... 1
PMS – Packaging Modeling and Sim... 1
PS/E – Process Simplification/En... 1
Package & Electrical Design 1
Package Reliability 1
Packaging & Interconnect Systems 1
Packaging Materials Interfaces 1
Pat(MPS) – Patterning 1
PatMat – Patterning Materials 1
PatSys – Patterning Systems 1
PhyDes – Physical Design 1
Physical Design 1
Plasma Etch 1
Process Architecture 1
Processes – Processes 1
Quality & Reliability 1
Rapid Yield Learning 1
Reliability 1
Resist 1
SLD – System Level Design 1
SemiSynBio – Semiconductor Synth... 1
Semiconductor Modeling & Simulat... 1
Signal/Power Management 1
Substrates 1
Synthesis & Verification 1
TCAD-MBPS 1
TM – Thermal Management 1
TT – Test & Testability 1
TechCAD – Technology CAD 1
VER – Verification 1

1 through 25 of 25 similar documents, best matches first.   
1: pdfMicrosoft Word - Executive Summary-Schenkel-Nov01-10
1 Participants only: Not for distribution. 2nd Deterministic Doping Workshop November 12, 2010, UC Berkeley Executive Summary Title: Deterministic doping by single ion ...
URL: https://www.src.org/...100-03-executive-summary-schenkel.pdf
Modified: 2010-11-09 - 71KB
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2: pdfSlide 1
ITRS - Deterministic Doping, Thomas Schenkel, LBNL, Nov. 12, 2010 Single Ion Implantation Thomas Schenkel Lawrence Berkeley National Laboratory T_Schenkel@LBL.gov ITRS - ...
URL: https://www.src.org/calendar/e004100/e004100-00-session2.pdf
Modified: 2010-11-29 - 52.6MB
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3: pdfSlide 1
230 250 270 290 310 0 0 0 0 0 0 0 0 1 2 240 260 280 300 V G (mV) V G (mV) I (nA) V SD = - 30 mV The absence of steps the sequential nature coupling of the atom. Figure 4b shows ...
URL: https://www.src.org/calendar/e004100/e004100-00-session3.pdf
Modified: 2010-11-29 - 29.2MB
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4: pdfスライド 1
1 2nd ITRS Deterministic Doping Workshop, Nov. 12, 2010, D. Herr & T. Shinada International Technology Roadmap for Semiconductors 2nd Deterministic Doping Workshop Emerging ...
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6: pdfMicrosoft Word - ITRSpaperfinal.doc
Transport metrology for ultra-scaled MOSFETs G.C. Tettamanzi 1,* , G.P. Lansbergen 1 , J. Verduijn 1 , R. Rahman 2 , A. Paul 2 , S. Lee 2 N. Collaert 3 , S. Biesemans 3 , G. ...
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7: Semiconductor Research Corporation - SRC
GRC GRC Global Research Collaboration Our motivation is to fund the most relevant and critical research for international companies, so we go where the best university talent ...
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8: pdfExecSummary MICurrent.doc
1 Participants only: Not for distribution. 2nd Deterministic Doping Workshop November 12, 2010, UC Berkeley Title: Doping of atomic-scale processed materials and devices: a view ...
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9: NMS Nanoengineered Materials Annual Review (Event E004780) -...
NMS Nanoengineered Materials Annual Review Date: Tuesday, June 12, 2012 - Wednesday, June 13, 2012 Location: Dean's Suite 290, College of Business, 1307 West Highland St., ...
URL: https://www.src.org/calendar/e004780/
Modified: 2012-12-13 - 57KB
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10: pdfMicrosoft Word - Executive Summary [Koji INOUE][1].doc
1 Participants only: Not for distribution. 2nd Deterministic Doping Workshop November 12, 2010, UC Berkeley ) 50nm n-MOS p-MOS X Y Z Fig. 1. 3D elemental maps of full sections of ...
URL: https://www.src.org/...004100-07-executive-summary-inoue.pdf
Modified: 2010-11-09 - 1.3MB
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11: pdfスライド 1
1 2nd ITRS Deterministic Doping Workshop, Nov. 12, 2010, D. Herr & T. Shinada 2nd Deterministic Doping Workshop Emerging Research Materials (ERM) International Technology Roadmap ...
URL: https://www.src.org/...04100/e004100-00-presentationherr.pdf
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12: pdfMicrosoft Word - Executive Summary [M. Tabe]
Participants o Title: Single Name(s): Mi Affiliation(s) Introduction Recently, problems for single-dopan (Shizuoka U dopants as a In this bac technology t devices [10-1 work as ...
URL: https://www.src.org/...e004100-10-executive-summary-tabe.pdf
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13: pdfMicrosoft Word - Executive Summary Andrea Morello
Participants o Title: Dr. Name(s): An Affiliation(s) The Universi Introduction Doping semi properties of to dopants al of spintronic (1) The progr (2) The poss atoms in clas The ...
URL: https://www.src.org/...4100-12-executive-summary-morello.pdf
Modified: 2010-11-09 - 70KB
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14: pdfSRCNov12 2010revNov18.ppt
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URL: https://www.src.org/calendar/e004100/e004100-00-session1.pdf
Modified: 2010-11-29 - 8.2MB
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15: pdfMicrosoft Word - Executive Summary Your name _2_.doc
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16: pdf2nd Deterministic Doping Workshop
1 Participants only: Not for distribution. 2nd Deterministic Doping Workshop November 12, 2010, UC Berkeley Executive Summary Title: Professor and Director Name(s): Michelle ...
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17: GRC SEMATECH Engineering Research Center for Environmentally...
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18: pdfNMS Patterning Review Agenda
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19: pdfAugust 2011 Patterning Review Agenda
GRC Patterning Review Agenda Date: Wednesday, August 24, 2011 - Thursday, August 25, 2011 Location: 540 A/B Cory Hall, UC-Berkeley Campus, Berkeley, CA Wednesday, August 24, 2011 ...
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20: Oriented Crystal Nanowire Interconnects (Patent P1479) - SRC
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URL: https://www.src.org/library/patent/p1479/
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23: Engineering Research Center for Environmentally Benign Semiconductor...
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24: GRC SEMATECH Engineering Research Center for Environmentally...
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25: pdfMicrosoft Word - Executive Summary Asen Asenov
1 Participants only: Not for distribution. 2nd Deterministic Doping Workshop November 12, 2010, UC Berkeley Executive Summary Title: Professor Name(s): Asen Asenov Affiliation(s): ...
URL: https://www.src.org/...04100-11-executive-summary-asenov.pdf
Modified: 2010-11-09 - 54KB
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1 through 25 of 25 similar documents, best matches first.