Methods and Compositions for Forming Patterns with Isolated or Discrete Features Using Block Copolymer Materials
Inventors
- Paul Nealey (U of Wisconsin/Madison)
- Mark P. Stoykovich (Univ. Colorado/Boulder)
- Kostas Daoulas (U of Wisconsin/Madison)
- Huiman Kang (U of Wisconsin/Madison)
- Marcus Mueller (U of Wisconsin/Madison)
- Juan de Pablo (U of Wisconsin/Madison)
Related Patents
Methods and Compositions for Forming Patterns with Isolated or Discrete Features Using Block Coplymer Materials
Kostas Daoulas (U of Wisconsin/Madison); Juan de Pablo (U of Wisconsin/Madison); Huiman Kang (U of Wisconsin/Madison); Marcus Mueller (U of Wisconsin/Madison); Paul Nealey (U of Wisconsin/Madison); Mark P. Stoykovich (Univ. Colorado/Boulder)Patent Application Expired
Application Type: Provisional
Methods and Compositions for Forming Patterns with Isolated or Discrete Features Using Block Coplymer Materials
Kostas Daoulas (U of Wisconsin/Madison); Juan de Pablo (U of Wisconsin/Madison); Huiman Kang (U of Wisconsin/Madison); Marcus Mueller (U of Wisconsin/Madison); Paul Nealey (U of Wisconsin/Madison); Mark P. Stoykovich (Univ. Colorado/Boulder)Patent Issued (on 6-Aug-2013)
Application Type: Divisional