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MPS – Material & Process Sciences

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102

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EBSM	3
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PAT – Patterning	18
Pat(MPS) – Patterning	14
Factory Systems	13
BEP – Back End Processes	7
Back End Processes	7
ESH – Environment Safety and Hea...	3
PatMat – Patterning Materials	2
CFM&TCM – CFM & Total Chemical M...	1
DCMOS – Digital CMOS Technologie...	1
Doping Technologies	1
Front End Processes	1
Materials	1

1 through 30 of 102 similar documents, best matches first.

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1: Massively Parallel Addressable Array Cathode (Patent P0260) ...: Massively Parallel Addressable Array Cathode Application Type: Utility Patent Number: 5363021 Country: United States Status: Filed on 12-Jul-1993, Issued on 8-Nov-1994, Patent ...
URL: https://www.src.org/library/patent/p0260/
Modified: 1994-11-08 - 20KB
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2: Molecular Glass Photoresists (Patent P0566) - SRC: Molecular Glass Photoresists Application Type: Utility Patent Number: 7452658 Country: United States Status: Filed on 16-Feb-2006, Issued on 18-Nov-2008, Patent Abandoned ...
URL: https://www.src.org/library/patent/p0566/
Modified: 2008-11-18 - 23KB
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3: Double Hidden Flexure Microactuator for Phase Mirror Array (Patent...: Double Hidden Flexure Microactuator for Phase Mirror Array Application Type: Utility Patent Number: 7075699 Country: United States Status: Filed on 28-Sep-2004, Issued on ...
URL: https://www.src.org/library/patent/p0508/
Modified: 2006-07-11 - 22KB
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4: Using Block Copolymers as Supercritical Fluid Developable Photoresists...: Using Block Copolymers as Supercritical Fluid Developable Photoresists Application Type: Utility Patent Number: 6379874 Country: United States Status: Filed on 26-Oct-1999, Issued ...
URL: https://www.src.org/library/patent/p0097/
Modified: 2002-04-30 - 22KB
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5: Growth of Inorganic Thin Films using Self-Assembled Monolayers...: Growth of Inorganic Thin Films using Self-Assembled Monolayers as Nucleation Sites Application Type: Utility Patent Number: 7829150 Country: United States Status: Filed on ...
URL: https://www.src.org/library/patent/p1139/
Modified: 2010-11-09 - 22KB
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6: Method for Patterning a Radiation Sensitive Layer (Patent P0087...: Method for Patterning a Radiation Sensitive Layer Application Type: Utility Patent Number: 6509138 Country: United States Status: Filed on 12-Jan-2000, Issued on 21-Jan-2003 ...
URL: https://www.src.org/library/patent/p0087/
Modified: 2003-01-21 - 22KB
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7: Organoelement Resists for EUV Lithography and Methods of Making...: Organoelement Resists for EUV Lithography and Methods of Making the Same Application Type: Utility Patent Number: 7326514 Country: United States Status: Filed on 12-Mar-2004, ...
URL: https://www.src.org/library/patent/p0446/
Modified: 2008-02-05 - 22KB
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8: Supermolecular Structures and Devices Made From Same (Patent...: Supermolecular Structures and Devices Made From Same Application Type: Continuation Patent Number: 6897470 Country: United States Status: Filed on 14-Oct-2003, Issued on ...
URL: https://www.src.org/library/patent/p0425/
Modified: 2005-05-24 - 25KB
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9: Supermolecular Structures and Devices Made from Same (Patent...: Supermolecular Structures and Devices Made from Same Application Type: Utility Patent Number: 6664559 Country: United States Status: Filed on 23-Feb-2000, Issued on 16-Dec-2003, ...
URL: https://www.src.org/library/patent/p0165/
Modified: 2003-12-16 - 25KB
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10: Deterministically Doped Field Effect Devices and Methods of Making...: Deterministically Doped Field Effect Devices and Methods of Making Same Application Type: Continuation (in part) Patent Number: 7015546 Country: United States Status: Filed on ...
URL: https://www.src.org/library/patent/p0417/
Modified: 2006-03-21 - 23KB
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11: Solventless, Resistless, Direct Dielectric Patterning (Patent...: Solventless, Resistless, Direct Dielectric Patterning Application Type: Foreign National Patent Number: 171285 Country: Taiwan Status: Filed on 9-Jan-2001, Issued on 2-Jun-2003, ...
URL: https://www.src.org/library/patent/p0207/
Modified: 2003-06-02 - 22KB
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12: Solventless, Resistless, Direct Dielectric Patterning (Patent...: Solventless, Resistless, Direct Dielectric Patterning Application Type: European Patent Office Patent Number: 1269259 Status: Filed on 11-Jan-2001, Issued on 8-Aug-2012, Patent ...
URL: https://www.src.org/library/patent/p0308/
Modified: 2012-08-08 - 22KB
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13: Multiple-Thickness Gate Oxide Formed by Oxygen Implantation ...: Multiple-Thickness Gate Oxide Formed by Oxygen Implantation - device claims Application Type: Utility Patent Number: 6855994 Country: United States Status: Filed on 5-Sep-2001, ...
URL: https://www.src.org/library/patent/p0259/
Modified: 2005-02-15 - 26KB
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14: Multiple-Thickness Gate Oxide Formed by Oxygen Implantation ...: Multiple-Thickness Gate Oxide Formed by Oxygen Implantation - Method claims Application Type: Utility Patent Number: 6753229 Country: United States Status: Filed on 24-Nov-1999, ...
URL: https://www.src.org/library/patent/p0086/
Modified: 2004-06-22 - 26KB
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15: Optical Proximity Correction Using Regression (Patent P1118)...: Optical Proximity Correction Using Regression Application Type: Utility Patent Number: 8201110 Country: United States Status: Filed on 14-Apr-2009, Issued on 12-Jun-2012, Patent ...
URL: https://www.src.org/library/patent/p1118/
Modified: 2012-06-12 - 24KB
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16: Molecular Transfer Printing Using Block Copolymers (Patent P1163...: Molecular Transfer Printing Using Block Copolymers Application Type: Utility Patent Number: 8133341 Country: United States Status: Filed on 1-Apr-2009, Issued on 13-Mar-2012, ...
URL: https://www.src.org/library/patent/p1163/
Modified: 2012-03-13 - 26KB
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17: Capacitorless Dram Device on Silicon-On-Insulator Substrate ...: Capacitorless Dram Device on Silicon-On-Insulator Substrate Application Type: Utility Patent Number: 5448513 Country: United States Status: Filed on 2-Dec-1993, Issued on ...
URL: https://www.src.org/library/patent/p0032/
Modified: 1995-09-05 - 25KB
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18: Fabrication of Group III-Nitride Photocathode Having Cs Activation...: Fabrication of Group III-Nitride Photocathode Having Cs Activation Layer Application Type: Continuation (in part) Patent Number: 7455565 Country: United States Status: Filed on ...
URL: https://www.src.org/library/patent/p1082/
Modified: 2008-11-25 - 23KB
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19: Ultrapure Water Treatment System (Patent P0071) - SRC: Ultrapure Water Treatment System Application Type: Utility Patent Number: 5302356 Country: United States Status: Filed on 4-Mar-1992, Issued on 12-Apr-1994, Patent Expired ...
URL: https://www.src.org/library/patent/p0071/
Modified: 1994-04-12 - 21KB
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20: Method for Making Masks (Patent P0064) - SRC: Method for Making Masks Application Type: Utility Patent Number: 5326659 Country: United States Status: Filed on 5-Mar-1992, Issued on 5-Jul-1994, Patent Expired Organization: ...
URL: https://www.src.org/library/patent/p0064/
Modified: 1994-07-05 - 21KB
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21: Step and Flash Imprint Lithography (Patent P0238) - SRC: Step and Flash Imprint Lithography Application Type: Utility Patent Number: 6334960 Country: United States Status: Filed on 11-Mar-1999, Issued on 1-Jan-2002, Patent Expired ...
URL: https://www.src.org/library/patent/p0238/
Modified: 2002-01-01 - 25KB
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22: Materials and Methods for Creating Imaging Layers (Patent P1140...: Materials and Methods for Creating Imaging Layers Application Type: Continuation Patent Number: 7851252 Country: United States Status: Filed on 17-Feb-2009, Issued on 14-Dec-2010, ...
URL: https://www.src.org/library/patent/p1140/
Modified: 2010-12-14 - 26KB
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23: Novel Non-Crystalline Oxides for Use in Microelectronic, Optical...: Novel Non-Crystalline Oxides for Use in Microelectronic, Optical and Other Applications Application Type: Utility Patent Number: 6787861 Country: United States Status: Filed on ...
URL: https://www.src.org/library/patent/p0225/
Modified: 2004-09-07 - 27KB
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24: Measurement of Ultrafine Particle Size Distributions (Patent...: Measurement of Ultrafine Particle Size Distributions Application Type: Utility Patent Number: 5072626 Country: United States Status: Filed on 14-Jul-1989, Issued on 17-Dec-1991, ...
URL: https://www.src.org/library/patent/p0102/
Modified: 1991-12-17 - 21KB
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25: Langmuir Probe System for Radio Frequency Excited Plasma Processing...: Langmuir Probe System for Radio Frequency Excited Plasma Processing System Application Type: Utility Patent Number: 5339039 Country: United States Status: Filed on 29-Sep-1992, ...
URL: https://www.src.org/library/patent/p0130/
Modified: 1994-08-16 - 22KB
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26: Conductors Created by Metal Deposition Using Selective Passivation...: Conductors Created by Metal Deposition Using Selective Passivation Layer and Related Methods Application Type: Utility Patent Number: 7534967 Country: United States Status: Filed ...
URL: https://www.src.org/library/patent/p0447/
Modified: 2009-05-19 - 23KB
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27: Passivated Copper Conductive Layers for Microelectric Applications...: Passivated Copper Conductive Layers for Microelectric Applications Application Type: Divisional Patent Number: 6057223 Country: United States Status: Filed on 10-Feb-1998, Issued ...
URL: https://www.src.org/library/patent/p0048/
Modified: 2000-05-02 - 22KB
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28: Method for Testing and Diagnosing MOS Transistors (Patent P0188...: Method for Testing and Diagnosing MOS Transistors Application Type: Utility Patent Number: 6275059 Country: United States Status: Filed on 4-Oct-1999, Issued on 14-Aug-2001, Patent ...
URL: https://www.src.org/library/patent/p0188/
Modified: 2001-08-14 - 22KB
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29: Polyelectrolyte Nanolayers as Diffusion Barriers In Semiconductor...: Polyelectrolyte Nanolayers as Diffusion Barriers In Semiconductor Devices Application Type: Utility Patent Number: 7081674 Country: United States Status: Filed on 11-Jun-2004, ...
URL: https://www.src.org/library/patent/p0466/
Modified: 2006-07-25 - 22KB
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30: Apparatus and Method for Uniform Microwave Plasma Processing...: Apparatus and Method for Uniform Microwave Plasma Processing Using TE11 and TM11 Modes Application Type: Utility Patent Number: 5302803 Country: United States Status: Filed on ...
URL: https://www.src.org/library/patent/p0139/
Modified: 1994-04-12 - 21KB
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1 through 30 of 102 similar documents, best matches first.

Results by:	Page: 1 2 3 4	next >>